MOS Slit Cutting Test-3
Tokoku
10/17/2006 Updated
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Test procedure
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( 1 ) Find best parameters.
>>>( 2 ) Make many slits with different widths at different position.
>>>( 3 ) Measure the slit widths with microscope and
determine relation between inputs versus outputs of the laser.
( 4 ) Cooling test with CIAO test dewar if anodized mask will be used.
( 5 ) Cooling test in MOIRCS with stars and pinhole-mask
if anodized mask will be used.
( - ) Ask for Yutani-san for cutting anodized material with laser.
( Exhaust instrument might be different. )
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Tests & Results
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w/MOIRCS frame, 1-time cutting for each slit, current=22A, marking speed=1mm/s, Qsw=1kHz, feed speed=6mm/m
Input [mm]
| Output [um] |
Enlarged view [um] |
0.03 |
|
|
0.05 |
|
|
0.1 |
|
|
0.15 |
|
|
0.20 |
|
|
0.25 |
|
|
0.30 |
|
|
0.35 |
|
|
|
* The width are measured at backside of the mask.
* The data with width of >0.1mm are not used for fitting
since they have no guaranteed accuracy.
* Slit direction is horizontal.
old
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Comments
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22A, feed speed=10mm/m, 4-time cutting, width=0.3mm