| - |
Type |
Press.
[psi] |
Press. Max
[psi] |
Press. @Summit
[psi] |
Operation |
| 電磁バルブ |
VARIAN 1291-L6613-301 |
80-100 |
100 |
100 |
Close when power loss / spring closed - air open |
| ゲートバルブ |
MDC LGV-8000V-P |
70-100 |
- |
|
| マスクキャッチャー回転 |
SMC MSUB20-180S |
22-145 |
217 |
|
| マスクキャッチャー開閉 |
MDC ALM-275-1 |
60-80 |
|
|
| ロボハンド |
MDC ALM-275-1 |
60-80 |
|
|
|