MOS Slit Cutting Test-3
Tokoku
10/17/2006 Updated

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Test procedure 
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   ( 1 ) Find best parameters.
>>>( 2 ) Make many slits with different widths at different position.
>>>( 3 ) Measure the slit widths with microscope and
         determine relation between inputs versus outputs of the laser.
   ( 4 ) Cooling test with CIAO test dewar if anodized mask will be used.
   ( 5 ) Cooling test in MOIRCS with stars and pinhole-mask
         if anodized mask will be used.

   ( - ) Ask for Yutani-san for cutting anodized material with laser.
         ( Exhaust instrument might be different. )

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Tests & Results
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w/MOIRCS frame, 1-time cutting for each slit, current=22A, marking speed=1mm/s, Qsw=1kHz, feed speed=6mm/m
Input [mm] Output [um] Enlarged view [um]
0.03
0.05
0.1
0.15
0.20
0.25
0.30
0.35
* The width are measured at backside of the mask. * The data with width of >0.1mm are not used for fitting since they have no guaranteed accuracy. * Slit direction is horizontal. old ------------------------------ Comments ------------------------------ 22A, feed speed=10mm/m, 4-time cutting, width=0.3mm